| 13:30-13:55 | Keynote |
Wafer-level Perfect Conformal Contact Photolithography towards the Diffraction Limit |
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| 13:55-14:20 | Keynote |
Fabrication of nanostructures on non-flat irregular surface, slanted/blazed gratings and meta-lens |
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| 14:20-14:39 | Invited |
Fabrication of cross-scale micro-nano structures and applications |
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| 14:39-14:58 | Invited |
Laser nanoprinting of broad-spectrum inorganic materials |
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| 14:58-15:17 | Invited |
Enabling novel devices with the nanofrazor |
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| 15:17-15:31 | Oral Report |
Nanoscale 3D printing for empowering future nanodevices |
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| 15:30-15:45 | Other |
Coffee Break |
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| 15:45-16:10 | Keynote |
Development of a full ecological NIL industrial platform |
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| 16:10-16:35 | Keynote |
There is plenty of room on the micro-cantilever: atomic force microscopy based nanoscale measurement & fabrication |
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| 16:35-16:54 | Invited |
E-beam lithography with single nanometer stitching accuracy |
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| 16:54-17:13 | Invited |
Challenge the frontiers of nanotechnology, a combination of high-precision writing and imaging tools |
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| 17:13-17:32 | Invited |
Intelligent and diverse micro manufacturing solution (femtosecond lasers, multi-source focused ion beams, and electron beam lithography) |
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| 17:32-17:51 | Invited |
Advanced etching technologies and applications of deep silicon etching |
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